Biofunctional porous silicon micropatterns engineered through visible light activated epoxy capping and selective plasma etching.
C. Rodriguez, O. Ahumado, V. Cebrian, et al.
Vacuum 150, 232, (2018).
Biofunctional porous silicon micropatterns engineered through visible light activated epoxy capping and selective plasma etching.
C. Rodriguez, O. Ahumado, V. Cebrian, et al.
Vacuum 150, 232, (2018).