Microwave plasma annealing of sol-gel deposited tantalum oxide and zinc oxide films.
R. Ramadan, J.G. Simiz, M.D. Ynsa, et al.
Caccum 149, 336, (2018).
Microwave plasma annealing of sol-gel deposited tantalum oxide and zinc oxide films.
R. Ramadan, J.G. Simiz, M.D. Ynsa, et al.
Caccum 149, 336, (2018).